- Removing defective micro LED chips and filling good chips
- In trimming mode, defective micro LED chips are selectively removed by irradiation with U / Excimer laser, based on inspection equipment data.
- In repair mode, good micro LED chips are transferred from release plate
(SQRP Series made by Shin-Etsu Chemical Co., Ltd.) to the missing position,
based on inspection equipment data.
- Efficiently utilize micro LED chips by transferring from release plate by Gap-LLO technology
- Accurate position trimming and repair by a combination of Galvanoscanner and photo mask
Uniquely developed technology "Uniform irradiation optics" and "Stage architecture“ achieve
- Non-contact & damage-less, high-throughput chip transfer
- Chip transfer accuracy of ±3 μm
- Minimized thermal drift