Loading...
High-Speed Repair Equipment (Trimming / Repair Equipment)

High-Speed Repair Equipment (Trimming / Repair Equipment)

  • Removing defective micro LED chips and filling good chips
  • In trimming mode, defective micro LED chips are selectively removed by irradiation with U / Excimer laser, based on inspection equipment data.
  • In repair mode, good micro LED chips are transferred from release plate
    (SQRP Series made by Shin-Etsu Chemical Co., Ltd.) to the missing position,
    based on inspection equipment data.
  • Efficiently utilize micro LED chips by transferring from release plate by Gap-LLO technology
  • Accurate position trimming and repair by a combination of Galvanoscanner and photo mask

Uniquely developed technology "Uniform irradiation optics" and "Stage architecture“ achieve
- Non-contact & damage-less, high-throughput chip transfer
- Chip transfer accuracy of ±3 μm
- Minimized thermal drift

Series Name

Invisi LUM-XTR

Other Products

Multi Laser Lift Off Equipment
(U / Excimer Laser)

Laser Mass Transfer Equipment
(U / Excimer Laser)

Bonding / Debonding Equipment

Micro LED Chip Transfer Parts